REMAINING CHARGE ERASING APPARATUS OF ELECTROSTATIC CHUCK SYSTEM

摘要

A remaining charge erasing apparatus for an electrostatic chuck system is provided to erase remaining charge from an electrode plate by applying high positive and negative pulse voltages to the electrode plate. When a signal detecting unit transmits a chucking completion signal to a micom(10), a voltage regulator(20) coverts an input voltage of a voltage supplier into a stabilized DC voltage. A converter(30) converts the DC voltage stabilized by the voltage regulator into a high DC voltage. A switching unit(40) converts positive and negative pulse signals of the micom into high positive/negative pulse signals. The micom generates a pulse width damped signal or voltage damped signal based on a PWM(Pulse Width Modulation) module and duty ratio.