发明名称 HIGHLY RESPONSIVE MASTER-SLAVE VALVE POSITIONING
摘要 A master valve and at least one slave valve are connected via a network, wherein upon broadcast of a position setpoint of the master valve the at least one slave valve achieves a corresponding position within a shortened period of time, such network being a dedicated network or high speed shared network with position setpoint priority.
申请公布号 US2007235668(A1) 申请公布日期 2007.10.11
申请号 US20060278071 申请日期 2006.03.30
申请人 MKS INSTRUMENTS, INC. 发明人 GOLDMAN DAVID J.;RYAN MARTIN;DAVIDKOVICH VLADISLAV;HILL GORDON
分类号 F16K31/12;A01G25/16 主分类号 F16K31/12
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