| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a flow detection device compactly structured, capable of accurately detecting a flow in the areas from a low flow area to a high flow area, and in which the lowering of the cooling efficiency in the high flow area is suppressed. <P>SOLUTION: When the flow is zero, the projection part 48 of a movable body 42 is brought into contact with an inner wall surface 40a, and a pressure receiving space 49 is formed between the projection part and a lower end surface 47. A high-pressure refrigerant gas presses the lower end surface 47 to bias the movable body 42 upward. A low-pressure refrigerant gas in a low-pressure fluid chamber 53 passes through a branch flow passage 55, and flows into a sealed chamber 41. The movable body 42 is moved, by a flow pressure difference, to a position where it is kept in balance with the biasing force of a spring 45, and a flow passage 40 is gradually enlarged. The lower end surface 47 of the movable body 42 opens a bypass passage 52 in the high flow area, the large amount of high-pressure refrigerant gas passes into the low-pressure fluid chamber 53 through the flow passage 40 and the bypass passage 52. A change in the flow differential pressure becomes slow. Consequently, the change in the flow pressure difference in the areas from the low flow area to the high flow area can be brought near a bold line N. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
