发明名称 Interferometer utilizing a rotating rigid structure
摘要 The invention relates to an interferometer, comprising at least a beam splitter ( 10 ), an end mirror ( 11 ) for returning beams (S 2 , S 3 ), and a set of mirrors ( 12, 13, 14, 15 ) for reflecting the beams (S 2 , S 3 ) between the beam splitter ( 10 ) and the end mirror ( 11 ), at least some of said mirrors ( 12, 13, 14, 15 ) being mounted on a rigid structure ( 17 ) which is arranged to be rotatable around an axis (A). Said set of mirrors comprises at least one pair of planar mirrors, constituted by two plane mirrors ( 12, 13 ), and two angular mirrors ( 14, 15 ), constituted by plane mirrors and arranged to deflect a course of the beam (S 2 , S 3 ) hitting the angular mirror ( 14, 15 ) and to direct the beams (S 2 , S 3 ), guided from the beam splitter ( 10 ) by way of at least one pair of plane mirrors ( 12, 13 ) to the angular mirrors ( 14, 15 ), to the end mirror ( 11 ) and back to the beam splitter ( 10 ).
申请公布号 US7280217(B2) 申请公布日期 2007.10.09
申请号 US20040508151 申请日期 2004.09.17
申请人 NOVELTECH SOLUTIONS LTD. 发明人 KAUPPINEN JYRKI
分类号 G01B9/02;G01J3/45;G01J3/453 主分类号 G01B9/02
代理机构 代理人
主权项
地址