| 摘要 |
A process tube for manufacturing a semiconductor is provided to prevent the damage of a temperature detecting device, a wafer, and a wafer boat by fixing the temperature detecting device on the inner surface of a tube through a ring-shaped fixing device. A process tube(100) for manufacturing a semiconductor includes a tube(106), a temperature detecting device(110), and a fixing member(112). The tube(106) has a wafer boat(104) on which a plurality of wafers(102) are loaded. The temperature detecting device(110) is formed along the length of the tube(106), and detects the inner temperature of the tube(106). The fixing member(112) is formed on the inner wall of the tube(106), and prevents the temperature detecting device(110) from contacting with the wafer boat(104) and the inner wall of the tube(106).
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