| 摘要 |
An optical system for widening scope and a device for inspecting impurities using the same are provided to decrease the speckle noise by rotating a diffuser through a speckle reducing optical system and varying the beam angle, and to change the optical path by applying the high frequency to the laser beam through the high voltage. A device for inspecting impurities comprises a light source(15), a speckle reducing optical system(17), a photographing unit(30), and a scope widening optical system(21). The speckle reducing optical system reduces the speckle noise of the laser light. The photographing unit stores the projected laser light as image information. The scope widening optical system is placed on the optical path before reflecting the laser beam on a base material(13) to control the diffusion of the laser beam to be projected to the photographing unit. A diffuser is rotated and a beam angle is varied through the speckle reducing optical system to reduce the speckle noise. The optical path is changed by applying the high frequency to the laser beam through the high voltage.
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