| 摘要 |
PROBLEM TO BE SOLVED: To provide a group control system by which productivity of an IC manufacturing plant is improved. SOLUTION: Several floor layout image data files are previously prepared and stored in a storing folder (step A1). When a floor layout image is registered, a floor layout image data file which matches with the actual layout is selected from the stored group of floor layout image data files and is read into a layout display system 30 (step A2). Several substrate processing apparatuses M1 to Mn are arranged in sequence, on the basis of the actual floor layout drawings in the floor layout image data file which is indicated on an operation screen (step A3). A floor layout details display file is stored (step A4). COPYRIGHT: (C)2008,JPO&INPIT
|
