| 摘要 |
<P>PROBLEM TO BE SOLVED: To compensate a change of a motor constant caused by a temperature change of permanent magnet in a motor control system for positioning a lithography device. <P>SOLUTION: A positioning system positions a patterning support and a substrate support. The positioning system has a motor including a stator and a mover connected to the supports, and the motor control system including a controller for providing an output for controlling a current applied to the motor. The motor control system determines a controller output required for compensating for the weights of the mover and the related supports, determines a deviation from an output required for compensating for weights applied to the mover and the related supports, and corrects a current applied to the motor based on the deviation. <P>COPYRIGHT: (C)2008,JPO&INPIT |
