| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing apparatus suitable for the manufacture of a polymer film capable of reducing the thickness irregularity of the film or the breaking risk of the film caused by holding the film by clips in a case that drying or heating treatment is performed using a tenter type feed device when the polymer film, especially a polyimide film is manufactured, and a polymer film manufacturing method using the manufacturing apparatus. SOLUTION: The polymer film manufacturing apparatus having a clip tenter type treatment part has a means for cooling the clips so that the temperature of the clips becomes below 180°C at the grasping start point of time when the polymer film or a polymer precursor film is grasped at both side edge parts thereof by the clips to be fed. The polymer film manufacturing method using the polymer film manufacturing apparatus is also disclosed. COPYRIGHT: (C)2008,JPO&INPIT |
