MAGNETRON SPUTTERING DEVICE,申请号EP20020777488-传众专利搜索

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发明名称	MAGNETRON SPUTTERING DEVICE
摘要
申请公布号	EP1449234(B1)	申请公布日期	2007.10.03
申请号	EP20020777488	申请日期	2002.11.07
申请人	MONAGHAN, DERMOT PATRICK;BELLIDO-GONZALEZ, VICTOR	发明人	MONAGHAN, DERMOT PATRICK;BELLIDO-GONZALEZ, VICTOR
分类号	C23C14/34;H01J37/34;C23C14/35;H01J37/32	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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