| 摘要 |
<p>A laser annealing apparatus is provided to transmit laser power without damaging end surfaces of slender optical fibers even when a green laser with a high peak power is used as a heating light source in the crystallization annealing process of a low-temperature poly-silicon TFT. At least one of partially reflective mirrors(2-1 to 2-m) splits a laser beam emitted from laser oscillators(1-1 to 1-k) having a Q switching action into plural laser beams. Plural optical fibers(5-1 to 5-n) transmit the laser beams split by the partially reflective mirrors, respectively, with each emission end being arranged linearly in a cross direction. A first optical system synthesizes and homogenizes the laser beams emitted from the optical fibers, and a second optical system focuses the laser beam emitted from the first optical system on a surface of a work piece as a rectangular laser beam.</p> |
