| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electro-optical device manufacturing method, in which whether the depth of a division start area to be a start for dividing a substrate to be used for an electro-optical device from a large substrate is formed in set depth can be confirmed easily. <P>SOLUTION: The electrooptical device manufacturing method is provided with a division start area forming process (steps S2, S5, S8, S11) for forming a first reforming area along a division schedule line in set depth, in a mother substrate to form the division start region to be a start for division; an index-forming process (steps S1, S3, S4, S6, S7, S9, S10, S12) for forming a second reform region larger than the first reform region in the mother substrate in the same set depth as the division start region to form an index; and a division start area confirming process (steps S13 to S16) for estimating and confirming, at least the depth in the formed division start region by confirming the depth of the index. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
