| 发明名称 |
HARD CARBON FILM |
| 摘要 |
PROBLEM TO BE SOLVED: To provide a hard carbon film having excellent frictional properties. SOLUTION: The hard carbon film is formed on a discal substrate; contains an aluminum element of 0.5 atom% to 4.5 atom% in the surface or an inner part; has Young's modulus of 50 GPa to 180 GPa; and has a thickness of 0.5μm to 10μm. The aluminum element in the film exists as aluminum oxide and/or aluminum hydroxide. COPYRIGHT: (C)2007,JPO&INPIT |
| 申请公布号 |
JP2007247038(A) |
申请公布日期 |
2007.09.27 |
| 申请号 |
JP20060075881 |
申请日期 |
2006.03.20 |
| 申请人 |
HITACHI LTD |
发明人 |
OKAMOTO SHINYA;NAKAJIMA SHOICHI;BABA NOBORU;YAMAGUCHI SHIZUKA |
| 分类号 |
C23C14/06;C10M103/02;C10M125/04;C10M125/08;C10M125/10;C10M125/20;C10M169/04;C10N10/06;C10N20/00;C10N30/06;C10N40/02;C10N50/08;C10N70/00;C23C14/34;C23C28/00 |
主分类号 |
C23C14/06 |
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