| 摘要 |
PROBLEM TO BE SOLVED: To provide an element for detecting force with detection sensitivity improved or the element with a range that the proportional relation between an operating force and the output by the force is expanded. SOLUTION: The element comprises a basic block 4 and a pressure-receiving block 2 adhered to the surface of the basic block. When a force acts on the pressure-receiving block 2, there is a stress distribution on the adhesion surface between the pressure-receiving block 2 and the basic block 4. A resistance track, in which the piezoresistance effect appears in either the region, where a stress lower than a threshold specified between a maximum and a minimum stress (namely, the non-concentrated region of stress) or the region, where a stress higher than the threshold (namely, the concentrated region of stress) is formed selectively. When the resistance track in which the piezoresistance effect appears is formed in either the non-concentration region of stress or the concentration region of stress, the range where the proportional relation between the force and the output is expanded, or the detection sensitivity of the element for detecting force is improved. COPYRIGHT: (C)2007,JPO&INPIT
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