| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a dresser for a polishing pad capable of adjusting the surface condition of the pad precisely and stably. <P>SOLUTION: The dresser is configured so that a metallized layer 5 is provided on a base 4 made of ceramic and abrasive grains 2 are attached firmly by plating 6a and 6b. As the ceramic constituting the base 4, alumina may be adopted. The metallized layer 5 may be formed from one or more elements selected among Mo, Mn, W, Ni, Ag, Cu, Ti, Nb, and Zr. The abrasive grains 2 may be of diamond, while the plating 6a and 6b may be Ni plating. <P>COPYRIGHT: (C)2007,JPO&INPIT |
