VACUUM DEVICE, METHOD OF QUICKLY REDUCING WATER VAPOR PARTIAL PRESSURE IN VACUUM DEVICE, METHOD OF PREVENTING RISE OF WATER VAPOR PARTIAL PRESSURE IN LOAD LOCK CHAMBER, AND VACUUM PUMP FOR VACUUM DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a vacuum device for precisely controlling gas by feedback controlling the temperature of a cryopanel. SOLUTION: A hydrogen gas partial pressure signal, e.g., for a process chamber is input as a monitor signal from a monitor device 600 to a signal processor 602, and a reference value signal is also input to the signal processor. In accordance with the input signals, the signal processor 602 outputs a freezing power command value to a freezer 573 to feedback control the temperature of the cryopanel 570. Thus, hydrogen gas partial pressure in a vacuum chamber can be controlled. COPYRIGHT: (C)2007,JPO&INPIT