| 摘要 |
A method for manufacturing a ferroelectric capacitor includes the steps of: forming a ferroelectric capacitor having at least a lower electrode, a ferroelectric film and an upper electrode on a base substrate; and applying an anneal treatment to the ferroelectric capacitor in an oxygen atmosphere, wherein the step of forming the ferroelectric capacitor includes forming the ferroelectric capacitor to have a structure in which an electrode protection film composed of titanium oxide is provided on the upper electrode.
|
