| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid delivering apparatus which prevents polarization in a nozzle plate from occurring and can continuously deliver a liquid for a long time, and a liquid delivering method. SOLUTION: The liquid delivering apparatus 1 is provided with an insulating nozzle plate 7 in which a plurality of nozzles 10 having delivering openings 9 for delivering the liquid on a base material K, a cavity 13 communicated with the respective nozzles 10 and storing the liquid, an electrostatic voltage power source 14 applying an electrostatic voltage between the liquid and the base material K to generate an electrostatic attracting force, and a controlling means 17 for controlling applying the electrostatic voltage by the electrostatic voltage power source 14. A liquid delivering head 4 in which the nozzles 10 are made to be flat nozzles, an opposing electrode 6 opposing to the liquid delivering head 4 and supporting the base material K, and a carriage driving mechanism 18 for reciprocating and scanning the liquid delivering head 4 to the base material K, are provided. The controlling means 17 controls so that the electrostatic voltage power source 14 applies a voltage of reverse polarity on the outward path and the return path of the reciprocating movement of the liquid delivering head 4 to deliver the liquid from the nozzles 10. COPYRIGHT: (C)2007,JPO&INPIT
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