| 摘要 |
PROBLEM TO BE SOLVED: To provide a microelectromechanical element, capable of accelerating a transition operation of a movable section when the movable section performs bidirectional displacement, by setting an elastic force of an elastic supporting section for supporting the movable section at a specific region, and to provide a microelectromechanical element array, an optical modulation element, a microelectromechanical optical modulation element, a microelectromechanical element optical modulation element array and an image forming apparatus that employs these. SOLUTION: The movable section rotationally displaces from a state where the movable section rotationally displaces in a first direction and stops to a second direction different from the first direction, by using a physical action force generated by a driving section. When the time required for the movable section to reach a final displacement position from the rotational displacement is considered as a transition time, the relation between an elastic force value of the elastic supporting section and the transition time has the extreme value exhibiting the maximum transition time at a specific elastic force value, and the elastic value of the elastic supporting section may have an elastic force value not more than the extreme value. COPYRIGHT: (C)2007,JPO&INPIT |
