| 摘要 |
PROBLEM TO BE SOLVED: To provide a single-crystal substrate which can be easily pinched by a pair of pinching instruments, and to provide a method for processing the single-crystal substrate. SOLUTION: The single-crystal substrate 11 has at least two side faces 1c and 1d, which intersect with one surface 11 and the other surface 12 of the single-crystal substrate 11 and extend from one surface 11 toward the other surface 12. A part 7 to be pinched which is pinched by the pair of pinching instruments 40, in the direction of pinching of the two side faces 1c and 1d by the pair of pinching instruments 40 is formed. On the cross section, when the two side faces 1c and 1d divide the part 7 to be pinched in the direction of pinching by the pair of pinching instruments 40, the part 7 to be pinched has a top 7a which contacts each of the instruments 40. The top 7a is formed at a position closer to one surface 11, or to the other surface 12. COPYRIGHT: (C)2007,JPO&INPIT
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