| 摘要 |
A chuck is provided to shorten an interval of time for chucking or unchucking by adjusting easily the adhesive force of cilium for fixing an object such as a LCD panel. A chucking and unchucking apparatus is used to fix or transfer an object(1) such as a LCD panel in a fabricating process including selection of a position. At least one adhesive substrate(3) is prepared. A plurality of cilium(2) are stuck out of the adhesive substrate. The plurality of cilium are outlined and disposed on a small scale to generate van der Waals' force capable of being used to generate adhesive force in an object to be lifted up. The surface and structure of the plurality of cilium have various roughnesses.
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