| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a capacitor which can perform microfabrication. <P>SOLUTION: This method of manufacturing a capacitor 100 includes a step of forming a conductive layer 40 on the upper part of a substrate 1, a step of forming a dielectric layer 5 on the upper part of the conductive layer 40, a step of forming a nickel acid lanthanum layer 62 on the upper part of the dielectric layer 5, and a patterning step of etching at least the dielectric layer 5 using the at least the nickel acid lanthanum layer 62 as a mask. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
