| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a micropump providing pump performance which does not require an operation amplifier of high voltage resistance and alternating electric field, and is of low cost and small size but sufficiently endurable against practical use, a micropump array, a drive circuit for the micropump and a drive circuit for the micropump array. <P>SOLUTION: Pulse signal is applied to a first electrode of a piezoelectric element with using a voltage apply part of low voltage and reversed pulse signal which is reverse of the pulse signal is applied to a second electrode of the piezoelectric element with using the same voltage apply part of low voltage. Consequently, voltage of double of the pulse signal can be applied to the piezoelectric element while always applying electric field in a fixed direction with using the voltage apply part of low voltage, and the low cost and small size micropump providing pump performance sufficiently endurable against practical use, the micropump array, the drive circuit for the micropump and the drive circuit for the micropump array can be provided. <P>COPYRIGHT: (C)2007,JPO&INPIT |
