| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for fabricating an organic thin film transistor element with high performance and less deterioration in a simple process. SOLUTION: The organic thin film transistor element fabricating method fabricates the organic thin film transistor element on a support body including a gate electrode, a gate insulating layer, an organic semiconductor layer, a source electrode, and a drain electrode. The method comprises: a process for forming an organic semiconductor protective layer after a process for forming an organic semiconductor layer; a process for forming a light shielding layer on the organic semiconductor protective layer; and a process for removing the organic semiconductor protective layer other than the light shielding layer, after the process for radiating an active energy line toward a surface with the light shielding layer formed thereon in the support body. COPYRIGHT: (C)2007,JPO&INPIT
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