Illumination system with a grid unit,申请号EP20010123195-传众专利搜索

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发明名称	Illumination system with a grid unit
摘要
申请公布号	EP1202291(B1)	申请公布日期	2007.09.05
申请号	EP20010123195	申请日期	2001.09.28
申请人	CARL ZEISS SMT AG	发明人	WEISS, MARKUS, DR.;SINGER, WOLFGANG, DR.;KLEEMANN, BERND;WEDOWSKI, MARCO
分类号	G02B5/00;G21K1/06;G02B5/09;G02B5/18;G02B19/00;G02B27/00;G03F7/20;G21K5/04;H01L21/027	主分类号	G02B5/00
代理机构		代理人
主权项
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