| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical testing device capable of efficiently and accurately determining whether a defect is a fatal defect or a nonfatal defect. SOLUTION: A wavelength filter is arranged at an arbitrary position on an optical path from an optical source to an imaging element via a surface to be inspected. The brightness distribution of a linear region of the surface to be inspected including the defect is determined by the imaging element. This is compared with a reference value, thereby determining whether the defect is the fatal defect or the nonfatal defect. COPYRIGHT: (C)2007,JPO&INPIT
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