SCANNING PROBE MICROSCOPE DEVICE, NANO TWEEZERS DEVICE, AND SAMPLE SURFACE SHAPE OBSERVATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a scanning probe microscope device capable of gripping a separate probe and observing a sample. SOLUTION: An observing probe 10 and movable arm 20 disposed in nano tweezers 1 are opened or closed by a driving lever functioning as a heat actuator. When AFM observation is performed using a CNT401 as the probe disposed separately from the nano tweezers 1, the CNT401 disposed in a CNT cartridge is gripped with the nano tweezers 1. The nano tweezers 1 are inverted by an inversion driving mechanism by 180°so that the attitude with respect to the sample surface of the gripped CNT401 is suitable. Then, the tip of the CNT401 is made close to the sample surface, and the sample surface is AFM-observed in tapping mode. COPYRIGHT: (C)2007,JPO&INPIT