| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a flow rate detection device capable of accurately detecting a flow rate when the flow rate of a compressor is low and having reliability. <P>SOLUTION: A spool 41 is slidably loaded in a sealed sealed chamber 36, and a magnet 44 is buried on the bottomed part 43 side thereof. A balance spring 45 is installed on the bottomed part 43 side and an unequal pitch spring 46 serving as a nonlinear spring is installed on the tubular part 42 side. The unequal pitch spring 46 is wound at small intervals at the portion L1 to provide a strong spring power, and wound at large intervals at the portion L2 to provide a weak spring power. When a low differential pressure when the flow rate of the compressor is low is applied to the spool 41, the large interval portion L2 is largely deformed. When a high differential pressure is applied to the spool, the amount of displacement of the spool is reduced by the biasing of the small interval portion L1. Since the output of the magnetic sensor 55 against the flow rate is linearly changed and the detection sensitivity is kept constant, A change in flow rate ranging from the low-flow rate area to the high-flow rate area of the discharge flow rate can be accurately detected. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
