| 摘要 |
PROBLEM TO BE SOLVED: To generate a characteristic evaluation signal that is high in accuracy even when a distance (a lift-off) is varied between a measuring device and a semiconductor sample while avoiding an increase in size and costs of the measuring device when generating a semiconductor characteristic evaluation signal, on the basis of a reflected wave of an electromagnetic wave (an output wave) emitted to the semiconductor sample excited by excitation light. SOLUTION: The output wave Op1 (the electromagnetic wave) and excitation pulsed light are emitted to an excited part in the semiconductor sample 1 excited by the excitation light. The characteristic evaluation signal, in which an excited-part reflected-wave signal Sg1 is corrected, is generated on the basis of a detection signal Sg2 output by mixture of an output wave Op2 and a reflected wave Rt1 executed by a mixer 15, and correspondence relationship information between the detection signal Sg2 with a level of the excited-part reflected-wave signal Sg1 prerecorded therein and the excited-part reflected-wave signal Sg1, so as to store it in a storage means by a computer 11. COPYRIGHT: (C)2007,JPO&INPIT
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