| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam device in which the number of power supply for driving a plurality of poles constituting a multipolar lens of an aberration corrector having the multipolar lens in multiple stages is decreased, and cost is reduced without degrading the performance of aberration correction. SOLUTION: The aberration corrector 10 has a static magnetic type multipolar lens at a first stage 11 and the final stage 14, and a pair of electrostatic and static magnetic compound type multipolar lenses 12, 13 arranged in the regions interposed in between. A common current source corresponding to the type of magnetic field to be generated is connected to the coil provided in each pole of the multipolar lenses, and thereby, the number of the current sources is reduced. Also the voltage source of voltage to be impressed on each pole for generating the electric field is made common. The power source 26 is composed of these plurality of current sources and voltage sources. COPYRIGHT: (C)2007,JPO&INPIT
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