发明名称 |
POLISHING SHEET AND POLISHING WORK METHOD |
摘要 |
The present invention provides a polishing sheet that can secure a flatness of a material to be polished and can improve a polishing efficiency. A polishing pad 1 has a polyurethane sheet 2 made of polyurethane resin. The polyurethane sheet 2 has large cells 3 with a generally triangular sectional configuration rounded along a thickness direction thereof. Polyurethane resin exists in the polyurethane sheet 2 in a partition wall manner and fine foams 4 are formed in the polyurethane resin. Fine particles 5 added during manufacture of the polyurethane sheet 2 exist inside some of the fine foams 4 and the fine particles 5 are separable from the fine foams. By separating off fine particles positioned at a polishing face P by dummy polishing or the like, fine foams which evenly reserve a polishing liquid containing abrasive particles are formed at the polishing face P. |
申请公布号 |
US2007184757(A1) |
申请公布日期 |
2007.08.09 |
申请号 |
US20070733137 |
申请日期 |
2007.04.09 |
申请人 |
FUJI SPINNING CO., LTD. |
发明人 |
KUME TAKAHIRO;TAKEDA HIDENORI |
分类号 |
B24B1/00;B24B37/00;B24B7/19;B24B37/04;B24B37/20;B24B37/24;B24D3/00;B24D3/32;B24D11/00;B32B5/18;H01L21/304 |
主分类号 |
B24B1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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