| 摘要 |
The lens inspection system permits detecting scratches, extraneous objects, such as stains, and other kinds of defects of an optical member with high accuracy.
A light beam is projected from one side onto a lens to inspect, and a light transmitted and scattered through the lens is photo-electrically detected as a dark field image of the lens on the other side of the lens, and when the intensity of the photoelectric signal detected from an inspection range of a photoelectric imaging device goes above a preset level, the lens is judged to be defective. |
