| 摘要 |
PROBLEM TO BE SOLVED: To provide a system, a method and a computer program for analyzing circuit design. SOLUTION: This system, this method and this computer program for analyzing circuit design provide a means for discretizing a circuit pattern into a series of pixels. A fraction of at least one constituent material is determined for each pixel. A deflection is also determined for each pixel. The deflection is predicated upon a planarizing of the pixel, and it is calculated while utilizing an algorithm that includes the fraction of the at least one constituent material. A series of deflections for the series of pixels may be mapped and evaluated. COPYRIGHT: (C)2007,JPO&INPIT
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