SURFACE POSITION DETECTING APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a surface position detecting apparatus capable of accurately detecting a surface position of a surface to be detected.

SOLUTION: The surface position detecting apparatus 2 includes a light-sending optical system SL for sending detecting light supplied from a light source 1a onto a surface to be detected W from a diagonal direction; a light-receiving optical system RL for receiving the detecting light reflected by the surface to be detected W; and a detector 38 for detecting the detecting light via the light-receiving optical system RL and detects the surface position of the surface to be detected W on the basis of output of the detector 38. The wavelength of the detecting light includes the near-infrared wavelength.

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