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发明名称
ETCHANT AND ETCHING METHOD
摘要
申请公布号
KR100742069(B1)
申请公布日期
2007.07.23
申请号
KR20057004243
申请日期
2005.03.11
申请人
发明人
分类号
C09K13/04;H01L21/308;H01L21/311
主分类号
C09K13/04
代理机构
代理人
主权项
地址
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