| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for adjusting a condensing lens device used in a laser beam machining device to perform scanning with a laser beam by a beam scanning mechanism, and the method for adjusting the condensing lens device stably and accurately assembled, and to make lenses the surface shape of which is all aspherical and the material of which is all germanium usable so as to obtain high laser beam machining quality. SOLUTION: In the condensing lens device comprising a plurality of lenses, the axis of a lens is adjusted so that beam intensity distribution may be symmetric in upper and lower and right and left regions of an area which can be scanned with respect to the center of the area by using a lens holder 15 equipped with a mechanism for parallel displacing a second lens 12 in a two-dimensional direction orthogonal to an optical axis and fixing it. By using the lens holder equipped with a lens interval adjusting mechanism 19 capable of parallel displacing the lens in the optical axis direction and fixing it, and a mechanism capable of rotating the lens with the optical axis as the axis of rotation, the interval and the rotational angle of the lens are adjusted, whereby more homogeneous machining quality is obtained all over the area which can be scanned. COPYRIGHT: (C)2007,JPO&INPIT
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