| 摘要 |
The first integrated circuit/transducer device 36 of the handheld probe includes CMOS circuits 110 and cMUT elements 112 . The cMUT elements 112 function to generate an ultrasonic beam, detect an ultrasonic echo, and output electrical signals, while the CMOS circuits 110 function to perform analog or digital operations on the electrical signals generated through operation of the cMUT elements 112 . The manufacturing method for the first integrated circuit/transducer device 36 of the preferred embodiment includes the steps of depositing the lower electrode S 102 ; depositing a sacrificial layer S 104 ; depositing a dielectric layer S 106 ; removing the sacrificial layer S 108 , followed by the steps of depositing the upper electrode S 110 and depositing a protective layer on the upper electrode S 112.
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