HEATING APPARATUS FOR BATCH TYPE REACTION CHAMBER

摘要

A heating apparatus for a batch-type reaction chamber, in which a heater party including a plurality of heaters is arranged repeatedly along with a circumference of the reaction chamber, wherein each of the heaters has a temperature controlling part, a voltage applying line and a pair of a first and a second heating units, the pair of the first and the second heating units being separated from each other and serving as heating bodies for the reaction chamber and wherein the sum of the length of each pair of the first and the second heating units is fixed, each of the first heating units not having a same length and each of the second heating units not having a same, is provided.