| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing an actuator device that improves durability and reliability of a vibrating plate while preventing the occurrence of defects such as cracks in the vibrating plate. <P>SOLUTION: The manufacturing method is provided with a step for forming the vibrating plate 50 on one face of a substrate 10; and a step for forming a piezoelectric element 300 composed of a lower electrode 60, a piezoelectric material layer 70, and an upper electrode 80 on the vibrating plate 50. The step for forming the vibrating plate 50 at least has a step in which a zirconium layer is formed on one face side of the substrate 10, and also, an insulator film 55 composed of a zirconium oxide layer is formed by executing thermal oxidization to the zirconium layer while heating it up to a prescribed temperature with a temperature rising rate of ≥190°C/sec. <P>COPYRIGHT: (C)2007,JPO&INPIT |
