| 摘要 |
<P>PROBLEM TO BE SOLVED: To achieve precise length measurement of a pattern by determination of edge position with high accuracy and satisfactory reproducibility excluding effect of noise and so forth of an edge part of a line profile, in an edge detection method and an edge detection device detecting the edge position of a pattern to be subjected to length measurement on an image. <P>SOLUTION: The edge detection method includes: a step for acquiring a plurality of line profiles at different places across a pattern to be subjected to length measurement; a step for generating a model curve from a curve near the edge of the acquired line profiles; a step for superposing the generated model curve and the plurality of profiles, respectively, to calculate fitting points on the basis of difference in brightness, respectively; and a step for calculating as the edge position the points in which the position of the point where the model curve crosses a prescribed a threshold is added to the calculated fitting point, respectively. <P>COPYRIGHT: (C)2007,JPO&INPIT |
