发明名称 TRANSFER DEVICE
摘要 PROBLEM TO BE SOLVED: To easily set the adhesive force of an adhesive sheet in a transfer device which transfers an object to be transferred using the adhesive sheet. SOLUTION: The transfer device 1 transfers the object 2 to be transferred by holding the object 2 and releasing the held object 2. The transfer device 1 comprises the adhesive sheet 4 having an adhesive face 4a for holding the object 2 and a rear face 4b opposite to the adhesive face 4a, and an adhesive sheet fixing member 5 which has a sheet fixing face 5a to fix the rear face 4b to and is formed with an air supply hole 5b for supplying compressed air toward the rear face 4b. The sheet fixing face 5a has a fixing portion to fix the rear face 4b to and a non-fixing portion which is formed at a place corresponding to the air supply hole 5b and to which the rear face 4b is not fixed. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007180104(A) 申请公布日期 2007.07.12
申请号 JP20050374031 申请日期 2005.12.27
申请人 TSUBAKI SEIKO:KK 发明人 SAITO KOICHI
分类号 H01L21/683 主分类号 H01L21/683
代理机构 代理人
主权项
地址