发明名称 |
Two Dimensional Nanostructure Fabrication Method and Two Dimensional Nanostructure Fabricated Therefrom |
摘要 |
Disclosed herein is a method of fabricating a two dimensional (2D) nanostructure. The method includes heating a substrate within a vacuum chamber, injecting a metallic material into the vacuum chamber, adsorbing the metallic material on a surface of the substrate, and cooling the substrate to fabricate the 2D nanostructure on the surface of the substrate. The 2D nanostructures can be fabricated as monolayers.
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申请公布号 |
US2007161259(A1) |
申请公布日期 |
2007.07.12 |
申请号 |
US20060548442 |
申请日期 |
2006.10.11 |
申请人 |
SAMSUNG ELECTRONICS CO. LTD. |
发明人 |
SONG SE-AHN;LATYSHEV ALEXANDER V.;FEDINA LUDMILA I.;GUTAKOVSKII ANTON K.;KOSOLOBOV SERGEY S. |
分类号 |
H01L21/31;H01L21/469 |
主分类号 |
H01L21/31 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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