| 摘要 |
A disk assembly of an ion implanter includes a disk rotating in one direction, at least one wafer site on the disk for holding a wafer, at least one fence positioned outside an outer edge of the at least one wafer site and perpendicularly to the disk, a finger positioned outside the outer edge of the at least one wafer site and opposite the fence, at least one sensor having the capability of determining a position of the wafer relative to the fence, and a control unit electrically connected to the at least one sensor.
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