POLISHING LIQUID COMPOSITE FOR HARD DISC SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a polishing liquid composite for a hard disc substrate containing aluminum oxide particles as abrasive grains and capable of reducing piercing of the aluminum oxide particles on a substrate in manufacturing the hard disc substrate.

SOLUTION: This polishing liquid composite for the hard disc substrate contains the aluminum oxide particles and water, a volume medium grain diameter of secondary particles of the aluminum oxide particles is 0.1 to 0.7μm and the content of the particles having the grain diameter of more than 1μm in the aluminum oxide particles is less than 0.2 wt.%.

COPYRIGHT: (C)2007,JPO&INPIT