| 摘要 |
A substrate transfer apparatus is provided to properly control a driving motor which rotates a mapping arm by using a sensor detecting rotation of the mapping arm and a controller. A substrate transfer chamber(112) is located between a load port supporting a receptacle and a substrate processing module. A substrate transfer robot(118) is disposed in the substrate transfer chamber to transfer a substrate. A door opener(120) is disposed in the substrate transfer chamber to open and close a door of the receptacle. A first sensor has a light emitting portion(134a) and a light receiving portion(134b) for scanning the substrates received in the receptacle. Mapping arms(132a,132b) are rotatably installed on an upper portion of the door opener. A second sensor(144) detects positions of the mapping arms.
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