MULTIPLE HOLDER FOR ANALYSIS SEM-FIB SAMPLE

摘要

A multiple holder for analyzing SEM-FIB(Scanning Electrode Microscope-Focused Ion Beam) sample is provided to prevent damage and contamination of a target sample without attaching or detaching the target sample. A holder member(100) has a rectangular shape. A plurality of FIB sample fixing grooves(140) are formed on an upper surface of the holder member. An FIB fixing shaft(120) is formed at a lower surface of the holder member facing the FIB sample fixing grooves. An SEM fixing shaft(110) is perpendicular to the FIB fixing shaft on a front surface of the holder member. A plurality of SEM sample fixing grooves(130) are formed at an edge between a rear surface of the holder member and the FIB sample fixing grooves.