FERROELECTRIC FILM, SEMICONDUCTOR DEVICE, FERROELECTRIC FILM MANUFACTURING METHOD, AND FERROELECTRIC FILM MANUFACTURING APPARATUS,申请号KR20057014386-传众专利搜索

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发明名称	FERROELECTRIC FILM, SEMICONDUCTOR DEVICE, FERROELECTRIC FILM MANUFACTURING METHOD, AND FERROELECTRIC FILM MANUFACTURING APPARATUS
摘要
申请公布号	KR100732930(B1)	申请公布日期	2007.06.29
申请号	KR20057014386	申请日期	2005.08.04
申请人		发明人
分类号	C23C14/06;H01L27/105;C01G35/00;C23C14/08;H01B3/00;H01B3/12;H01L21/314;H01L21/316;H01L21/8246;H01L21/8247;H01L27/10;H01L29/788;H01L29/792	主分类号	C23C14/06
代理机构		代理人
主权项
地址

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