发明名称 |
Leitfähiges lithographisches Polymer und Verfahren zur Herstellung von Vorrichtungen unter Verwendung desselben |
摘要 |
A conductive photolithographic film and method of forming a device using the conductive photolithographic film. The method includes depositing a conductive photolithographic film on a top surface of a substrate; and patterning the conductive photolithographic film to create a desired circuit pattern using a lithographic process. The conductive photolithographic film comprising about 50% to about 60% of a mixture of epoxy acrylate, a thermal curing agent, and a conductive polymer; about 20% to about 30% of a lithographic reactive component; about 10% to about 15% of a photo-active material; and about 3% to about 5% of additives that enhance conductivity of the conductive photolithographic polymer. |
申请公布号 |
DE112005002156(T5) |
申请公布日期 |
2007.06.28 |
申请号 |
DE20051102156 |
申请日期 |
2005.08.26 |
申请人 |
INTEL CORPORATION |
发明人 |
SHIA, REBECCA;CHEN, TSUNG-YU |
分类号 |
G03F7/09;G03F7/038 |
主分类号 |
G03F7/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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