| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate with a transparent conductive film which is stable to prevent characteristics from being deteriorated due to chemical and physical actions in a display element production process or the like, and a manufacturing method thereof, with respect to the substrate on which the transparent conductive film using a zinc oxide (GZO) containing gallium or a zinc oxide (AZO) containing aluminum is formed. SOLUTION: A substrate 1 with a transparent conductive film has a transparent conductive film 20 formed on a surface of a substrate 10, and the transparent conductive film 20 includes a first transparent conductive film 21 formed on the surface of the substrate 10 directly or indirectly with another functional layer 23 between and a second transparent conductive film 22 formed on a surface of the first transparent conductive film 21, and the first transparent conductive film 21 is made of the zinc oxide AZO containing aluminum, the zinc oxide GZO containing gallium and the second transparent conductive film 22 is made of an indium oxide ITO containing tin. COPYRIGHT: (C)2007,JPO&INPIT
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