发明名称 |
Methods and arrangement for implementing highly efficient plasma traps |
摘要 |
An arrangement configured to contain plasma within plasma tube assembly of downstream microwave plasma system. Downstream microwave plasma system is configured to generate plasma within plasma-sustaining region of plasma tube assembly and channeling at least portion of plasma downstream to plasma processing chamber of downstream microwave plasma system. Arrangement includes a first hollow center electrically conductive disk surrounding a cylindrical structure that defines plasma passage of plasma tube assembly. Arrangement also includes a second hollow center electrically conductive disk also surrounding the cylindrical structure. Second hollow center electrically conductive disk is configured to be disposed in a spaced-apart relationship relative to first hollow center electrically conductive disk so as to form a first hollow center disk-shape interstitial region between first hollow center electrically conductive disc and second hollow center electrically conductive disc.
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申请公布号 |
US2007144441(A1) |
申请公布日期 |
2007.06.28 |
申请号 |
US20050318360 |
申请日期 |
2005.12.23 |
申请人 |
KAMAREHI MOHAMMAD;WANG ING-YANN A |
发明人 |
KAMAREHI MOHAMMAD;WANG ING-YANN A. |
分类号 |
C23F1/00;C23C16/00 |
主分类号 |
C23F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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